Invention Grant
- Patent Title: Semiconductor structure comprising p-type N-face GAN-based semiconductor layer and manufacturing method for the same
-
Application No.: US17086709Application Date: 2020-11-02
-
Publication No.: US12080786B2Publication Date: 2024-09-03
- Inventor: Kai Cheng
- Applicant: ENKRIS SEMICONDUCTOR, INC.
- Applicant Address: CN Suzhou
- Assignee: ENKRIS SEMICONDUCTOR, INC.
- Current Assignee: ENKRIS SEMICONDUCTOR, INC.
- Current Assignee Address: CN Suzhou
- Agency: Westbridge IP LLC
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/306 ; H01L29/15 ; H01L29/20 ; H01L29/205 ; H01L29/207 ; H01L29/66

Abstract:
Embodiments of the present application disclose a semiconductor structure and a manufacturing method for the semiconductor structure, which solve problems of complicated manufacturing process and poor stability and reliability of existing semiconductor structures. The semiconductor structure includes: a substrate; a channel layer, a barrier layer and a semiconductor layer sequentially superimposed on the substrate, wherein the semiconductor layer is made of a GaN-based material and an upper surface of the semiconductor layer is Ga-face; and a p-type GaN-based semiconductor layer, with N-face as an upper surface, formed in a gate region of the semiconductor layer.
Public/Granted literature
- US20210057560A1 Semiconductor Structure and Manufacturing Method for the Semiconductor Structure Public/Granted day:2021-02-25
Information query
IPC分类: