Invention Grant
- Patent Title: High electron mobility transistor and method for fabricating the same
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Application No.: US17671549Application Date: 2022-02-14
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Publication No.: US12080787B2Publication Date: 2024-09-03
- Inventor: Po-Yu Yang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN 2210041535.8 2022.01.14
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/02 ; H01L29/66

Abstract:
A method for fabricating a high electron mobility transistor (HEMT) includes the steps of first forming a buffer layer on a substrate, forming a barrier layer on the buffer layer, forming a p-type semiconductor layer on the barrier layer, forming a compressive stress layer adjacent to one side of the p-type semiconductor layer, and then forming a tensile stress layer adjacent to another side of the p-type semiconductor layer.
Public/Granted literature
- US20230231044A1 HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2023-07-20
Information query
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