Invention Grant
- Patent Title: Acoustic devices with feedback control of acoustic resistance
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Application No.: US17664013Application Date: 2022-05-18
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Publication No.: US12081941B2Publication Date: 2024-09-03
- Inventor: Siarhei Dmitrievich Barsukou
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: H04R17/02
- IPC: H04R17/02 ; B81B3/00 ; H03H9/02 ; H03H9/125 ; H03H9/17 ; H04R3/02 ; H04R3/06 ; H04R17/10 ; H04R31/00

Abstract:
A piezoelectric MEMS microphone includes a substrate and a piezoelectric sensor movably coupled to the substrate. The piezoelectric sensor includes a multilayer cantilever beam with multiple piezoelectric layers and multiple metal electrode layers. The beam is attached to the substrate and extends to a distal tip at a free unsupported end. A feedback control circuit is electrically connected to one or more of the metal electrode layers and applies a direct current bias voltage between at least two of the metal electrode layers to actively control an acoustic resistance of the piezoelectric sensor.
Public/Granted literature
- US20220408185A1 ACOUSTIC DEVICES WITH FEEDBACK CONTROL OF ACOUSTIC RESISTANCE Public/Granted day:2022-12-22
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