Acoustic devices with feedback control of acoustic resistance
Abstract:
A piezoelectric MEMS microphone includes a substrate and a piezoelectric sensor movably coupled to the substrate. The piezoelectric sensor includes a multilayer cantilever beam with multiple piezoelectric layers and multiple metal electrode layers. The beam is attached to the substrate and extends to a distal tip at a free unsupported end. A feedback control circuit is electrically connected to one or more of the metal electrode layers and applies a direct current bias voltage between at least two of the metal electrode layers to actively control an acoustic resistance of the piezoelectric sensor.
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