Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17877056Application Date: 2022-07-29
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Publication No.: US12082418B2Publication Date: 2024-09-03
- Inventor: Keisuke Uchida
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 19037445 2019.03.01
- Main IPC: H01L27/11573
- IPC: H01L27/11573 ; H01L27/11582 ; H10B43/27 ; H10B43/40

Abstract:
According to one embodiment, a semiconductor memory device includes: a stacked structure including a plurality of first layers stacked with a second layer therebetween above a substrate having a memory region in which a plurality of memory cells are arranged and an outer edge portion surrounding the memory region, the stacked structure having a stepped portion at which ends of the first layers form a stepped shape at an end of the stacked structure in a first direction within the memory region, wherein at least some of the first layers among the plurality of first layers extend, along a second direction perpendicular to the first direction, from above the outer edge portion at a first end side of the substrate through above the memory region over the substrate to above the outer edge portion at a second end side of the substrate.
Public/Granted literature
- US20220367507A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-11-17
Information query
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