- Patent Title: Micro-electro-mechanical-system structures and applications thereof
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Application No.: US17617917Application Date: 2020-06-11
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Publication No.: US12084340B2Publication Date: 2024-09-10
- Inventor: Mark A. Webb , Luc Jan Bousse , Arunava Steven Banerjee
- Applicant: Mekonos, Inc.
- Applicant Address: US CA San Francisco
- Assignee: Mekonos, Inc.
- Current Assignee: Mekonos, Inc.
- Current Assignee Address: US CA San Francisco
- Agency: Norton Rose Fulbright US LLP
- International Application: PCT/US2020/037321 2020.06.11
- International Announcement: WO2020/252213A 2020.12.17
- Date entered country: 2021-12-09
- Main IPC: B81B1/00
- IPC: B81B1/00

Abstract:
A Micro-Electro-Mechanical-System (MEMS) device and a method for operating the device are disclosed. The device includes a substrate platform and an electrode plate having a plurality of serpentine arms, the electrode plate attached to the substrate platform via the plurality of serpentine arms, the electrode plate provided on a plane in a resting position. The device includes a sharp member disposed substantially perpendicularly on the electrode plate. In various implementations, the electrode plate and the substrate platform are co-planar. In various implementations, the electrode plate is configured to move in a direction perpendicular to the plane away from the resting position. The device also includes a counter-electrode. The method of operating the device includes supplying, via a power source, a direct current (DC) across the electrode and the counter-electrode to generate an electrostatic field across the electrode and the counter-electrode of the device.
Public/Granted literature
- US20220306451A1 MICRO-ELECTRO-MECHANICAL-SYSTEM STRUCTURES AND APPLICATIONS THEREOF Public/Granted day:2022-09-29
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