Invention Grant
- Patent Title: Transistor-based stress sensor and method for determining a gradient-compensated mechanical stress component
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Application No.: US17583462Application Date: 2022-01-25
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Publication No.: US12085462B2Publication Date: 2024-09-10
- Inventor: Mario Motz
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Harrity & Harrity, LLP
- Priority: DE 2021200720.1 2021.01.27
- Main IPC: G01L1/22
- IPC: G01L1/22 ; G01L1/18 ; G01L9/06 ; H01L27/088 ; H01L29/84

Abstract:
A stress sensor includes a semiconductor substrate with a first transistor arrangement and a second transistor arrangement. The first transistor arrangement includes a first transistor with a first source-drain channel region and a second transistor with a second source-drain channel region. The first transistor and the second transistor are aligned relative to each other such that the current flow directions in the first and the second source-drain channel regions are opposite to each other. The second transistor arrangement includes a third transistor with a third source-drain channel region and a fourth transistor with a fourth source-drain channel region. The third transistor and the fourth transistor are aligned relative to each other such that the current flow directions in the third and the fourth source-drain channel regions are opposite to each other. The stress sensor generates a gradient-compensated output signal used to determine a mechanical stress acting on the semiconductor substrate.
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