Invention Grant
- Patent Title: Method for detecting pressure, and pressure sensor
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Application No.: US17762019Application Date: 2019-09-20
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Publication No.: US12085467B2Publication Date: 2024-09-10
- Inventor: Carsten Strietzel , Urs Wälchli , Stefan Kaiser , Christian Riesch , Bernhard Andreaus , Mario Weder
- Applicant: INFICON AG
- Applicant Address: LI Balzers
- Assignee: INFICON AG
- Current Assignee: INFICON AG
- Current Assignee Address: LI Balzers
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- International Application: PCT/EP2019/075367 2019.09.20
- International Announcement: WO2021/052599A 2021.03.25
- Date entered country: 2022-03-18
- Main IPC: G01L21/34
- IPC: G01L21/34

Abstract:
The invention relates to a method 100 for determining a pressure in a vacuum system, wherein the method comprises the steps of:
a) generating 101 a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and which is in electrical contact with a first electrode and a second electrode;
b) measuring 102 a current intensity of an electrical current flowing through the plasma between the first electrode and the second electrode;
c) measuring 103 a first radiation intensity of electromagnetic radiation of a first wavelength range which is emitted from the plasma, wherein the first wavelength range contains at least a first emission line of a first plasma species of a first chemical element;
d) measuring 104 a second radiation intensity of electromagnetic radiation of a second wavelength range which is emitted from the plasma, wherein the second wavelength range contains a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, and wherein the second emission line is outside the first wavelength range; and
e) determining 105 the pressure in the vacuum system as a function of the measured current intensity, the measured first radiation intensity, and the measured second radiation intensity. Further, the invention relates to a vacuum pressure sensor.
a) generating 101 a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and which is in electrical contact with a first electrode and a second electrode;
b) measuring 102 a current intensity of an electrical current flowing through the plasma between the first electrode and the second electrode;
c) measuring 103 a first radiation intensity of electromagnetic radiation of a first wavelength range which is emitted from the plasma, wherein the first wavelength range contains at least a first emission line of a first plasma species of a first chemical element;
d) measuring 104 a second radiation intensity of electromagnetic radiation of a second wavelength range which is emitted from the plasma, wherein the second wavelength range contains a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, and wherein the second emission line is outside the first wavelength range; and
e) determining 105 the pressure in the vacuum system as a function of the measured current intensity, the measured first radiation intensity, and the measured second radiation intensity. Further, the invention relates to a vacuum pressure sensor.
Public/Granted literature
- US20220334016A1 METHOD FOR DETECTING PRESSURE, AND PRESSURE SENSOR Public/Granted day:2022-10-20
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