Invention Grant
- Patent Title: Microscopic image capturing method and microscopic image capturing device
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Application No.: US17802350Application Date: 2020-03-09
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Publication No.: US12085704B2Publication Date: 2024-09-10
- Inventor: Akira Masuya , Tadao Yabuhara
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Volpe Koenig
- International Application: PCT/JP2020/010101 2020.03.09
- International Announcement: WO2021/181482A 2021.09.16
- Date entered country: 2022-08-25
- Main IPC: G02B21/36
- IPC: G02B21/36 ; G02B7/36 ; G02B21/24 ; G02B21/26

Abstract:
A microscopic image capturing method includes: emitting a light beam from a light beam light source; detecting a spot image by a camera or a photodiode; focusing the spot image by an objective lens actuator moving an objective lens in the optical axis direction of the light beam with respect to a sample container; determining by a reflective surface identification unit whether the light beam has been applied to a defect on the basis of the spot image; when it is determined that the light beam has been applied to the defect, moving by an XY stage the sample container with respect to the objective lens in a direction orthogonal to the optical axis of the light beam in accordance with a prescribed condition; and, when the light beam has not been applied to the defect, capturing a microscopic image of a sample by using an illuminator.
Public/Granted literature
- US20230100225A1 MICROSCOPIC IMAGE CAPTURING METHOD AND MICROSCOPIC IMAGE CAPTURING DEVICE Public/Granted day:2023-03-30
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