Invention Grant
- Patent Title: Optical system, heating arrangement, and method for heating an optical element in an optical system
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Application No.: US17805757Application Date: 2022-06-07
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Publication No.: US12085780B2Publication Date: 2024-09-10
- Inventor: Andrea Berner , Susanne Beder , André Dirauf , Hans-Michael Stiepan , Peter Klopfleisch
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2019219289.0 2019.12.11
- Main IPC: G02B7/18
- IPC: G02B7/18 ; G02B6/10 ; G02B6/26 ; G02B17/08 ; G03F7/00 ; H05B3/84 ; G02B23/02 ; G02B27/09

Abstract:
An optical system includes at least one optical element which has an optically effective surface and which is designed for an operating wavelength of less than 30 nm. The optical system also includes a heating arrangement for heating this optical element and comprising a plurality of IR emitters for irradiating the optically effective surface with IR radiation. The IR emitters are activatable and deactivatable independently of each other to variably set different heating profiles in the optical element. The optical system further includes at least one beam shaping unit for shaping the beam of the IR radiation steered onto the optically effective surface by the IR emitters. The optical system also includes a multi-fiber head comprising a multi-fiber connector for connecting optical fibers. IR radiation from a respective one of the IR emitters is suppliable by way of each of these optical fibers.
Public/Granted literature
- US20220299732A1 OPTICAL SYSTEM, HEATING ARRANGEMENT, AND METHOD FOR HEATING AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM Public/Granted day:2022-09-22
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