Invention Grant
- Patent Title: Semiconductor device with backside contact and methods of forming such
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Application No.: US17375264Application Date: 2021-07-14
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Publication No.: US12087837B2Publication Date: 2024-09-10
- Inventor: Ting-Yeh Chen , Yen-Ting Chen , Wei-Yang Lee , Chia-Pin Lin
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: HAYNES AND BOONE, LLP
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/8234 ; H01L29/06 ; H01L29/66 ; H01L29/786

Abstract:
In an exemplary aspect, the present disclosure is directed to a device. The device includes a fin-shaped structure extending lengthwise along a first direction. The fin-shaped structure includes a stack of semiconductor layers arranged one over another along a second direction perpendicular to the first direction. The device also includes a first source/drain feature of a first dopant type on the fin-shaped structure and spaced away from the stack of semiconductor layers. The device further includes a second source/drain feature of a second dopant type on the fin-shaped structure over the first source/drain feature along the second direction and connected to the stack of semiconductor layers. The second dopant type is different from the first dopant type. Furthermore, the device additionally includes an isolation feature interposing between the first source/drain feature and the second source/drain features.
Public/Granted literature
- US20220285510A1 Semiconductor Device with Backside Contact and Methods of Forming Such Public/Granted day:2022-09-08
Information query
IPC分类: