Invention Grant
- Patent Title: Method for forming semiconductor structures and semiconductor structure
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Application No.: US17452272Application Date: 2021-10-26
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Publication No.: US12089400B2Publication Date: 2024-09-10
- Inventor: Minki Hong
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN 2110258133.9 2021.03.09
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L29/78 ; H01L49/02 ; H10B12/00

Abstract:
The present disclosure provides a method for forming a semiconductor structure and a semiconductor structure. The method for forming a semiconductor structure includes: providing a substrate, and forming discrete bit line structures on the substrate; forming a first sacrificial layer on the surface of the substrate on the bottoms of gaps of the bit line structures; forming a second sacrificial layer filling the gaps of the discrete bit line structures; patterning the second sacrificial layer and the first sacrificial layer to form openings, the formed openings and the remaining of the second sacrificial layer being arranged alternately in an extension direction of the bit line structures; forming a dielectric layer filling the openings; and, removing the remaining of the first sacrificial layer and the remaining of the second sacrificial layer to form capacitor contact holes, the formed capacitor contact holes and the dielectric layer being arranged alternately.
Public/Granted literature
- US20220293609A1 METHOD FOR FORMING SEMICONDUCTOR STRUCTURES AND SEMICONDUCTOR STRUCTURE Public/Granted day:2022-09-15
Information query
IPC分类: