Invention Grant
- Patent Title: Semiconductor structure and preparation method thereof
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Application No.: US17575876Application Date: 2022-01-14
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Publication No.: US12089401B2Publication Date: 2024-09-10
- Inventor: Jingwen Lu
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2110342460.2 2021.03.30
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/768

Abstract:
A preparation method of a semiconductor structure includes: providing a base; forming several bit lines arranged in parallel and at intervals on the base, which extend in a first direction; forming capacitor contact material layers between adjacent bit lines, upper surfaces of which are lower than upper surfaces of the bit lines; forming filling medium layers on the capacitor contact material layers; forming several first mask patterns arranged in parallel and at intervals on the filling medium layers and the bit lines, which extend in a second direction that intersects with the first direction; patterning the filling medium layers based on the first mask patterns to form several grooves in the filling medium layers; forming second mask patterns in the grooves; and patterning the capacitor contact material layers based on the second mask patterns to form several cylindrical capacitor contact structures arranged in parallel and at intervals.
Public/Granted literature
- US20220320108A1 SEMICONDUCTOR STRUCTURE AND PREPARATION METHOD THEREOF Public/Granted day:2022-10-06
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