Invention Grant
- Patent Title: Nozzle inspection method, nozzle inspection apparatus, and substrate processing apparatus including the same
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Application No.: US17870835Application Date: 2022-07-22
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Publication No.: US12090754B2Publication Date: 2024-09-17
- Inventor: Sang Uk Son , Yong Tak Hyun , Dae Sung Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Womble Bond Dickinson (US) LLP
- Priority: KR 20210111462 2021.08.24
- Main IPC: B41J2/045
- IPC: B41J2/045
Abstract:
Provided are a nozzle inspection method and a nozzle inspection apparatus capable of accurately detecting a defect in an inkjet head nozzle within a short time. The nozzle inspection method comprises discharging a plurality of droplets into a first region of interest of a substrate using a first nozzle to form an inspection pattern, and determining whether the first nozzle is defective based on the inspection pattern.
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