Invention Grant
- Patent Title: Determination of mass/time ratios for buffer members used during growth of single crystal silicon ingots
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Application No.: US18154418Application Date: 2023-01-13
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Publication No.: US12091769B2Publication Date: 2024-09-17
- Inventor: Matteo Pannocchia , Francesca Marchese , James Ho Wai Kitt
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Armstrong Teasdale LLP
- Main IPC: C30B15/00
- IPC: C30B15/00 ; C30B15/12 ; C30B15/20 ; C30B29/06

Abstract:
Methods for producing single crystal silicon ingots by Continuous Czochralski (CCz) are disclosed. A batch of buffer members (e.g., quartz cullets) is added to an outer melt zone of the crucible assembly before the main body of the ingot is grown. In some embodiments, the ratio of the mass M of the batch of buffer members added to the melt to the time between adding the batch of buffer members to the melt and when the ingot main body begins to grow is controlled such that the ratio of M/T is greater than a threshold M/T.
Public/Granted literature
- US20230142420A1 DETERMINATION OF MASS/TIME RATIOS FOR BUFFER MEMBERS USED DURING GROWTH OF SINGLE CRYSTAL SILICON INGOTS Public/Granted day:2023-05-11
Information query
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