- Patent Title: Sensor, strain detection sensor, pressure sensor, and microphone
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Application No.: US17669402Application Date: 2022-02-11
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Publication No.: US12092533B2Publication Date: 2024-09-17
- Inventor: Masashi Kubota , Ville Kaajakari , Masaki Takeuchi
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP 19192058 2019.10.21
- Main IPC: G01L1/12
- IPC: G01L1/12 ; G01L9/16 ; H04R15/00

Abstract:
A sensor includes a film portion deformable by external force, a support body supporting the film portion, and a magnetoresistive element portion on the film portion and including a unit element that includes a first magnetic layer whose magnetization direction changes in accordance with deformation of the film portion, a second magnetic layer whose magnetization direction is fixed, and an intermediate layer between the first and second magnetic layers. The film portion includes a first side portion in a portion of an outer edge of the film portion. A slit portion is provided in the film portion and includes at least a portion along the first side portion, so that the film portion includes a connection portion in which the first side portion is partially connected to the support body. A magnetoresistive element portion is provided in the connection portion.
Public/Granted literature
- US20220163410A1 SENSOR, STRAIN DETECTION SENSOR, PRESSURE SENSOR, AND MICROPHONE Public/Granted day:2022-05-26
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