In one example, a light detection and ranging (LiDAR) module is provided. The LiDAR module includes a microelectromechanical system (MEMS), a substrate on which the MEMS is formed, and one or more measurement circuits. The MEMS includes an array of micro-mirror assemblies. One or more micro-mirror assemblies of the array of micro-mirror assemblies further includes a measurement structure connected to the micro-mirror, an electrical resistance of the measurement structure being variable based on a rotation angle of the micro-mirror. The one or more measurement circuits are configured to: determine the electrical resistance of the measurement structure of the one or more micro-mirror assemblies; and provide the determined electrical resistance to enable measurement of a rotation angle of the micro-mirror of the one or more micro-mirror assemblies.