Invention Grant
- Patent Title: High-density capacitor for focal plane arrays
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Application No.: US17244679Application Date: 2021-04-29
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Publication No.: US12094891B2Publication Date: 2024-09-17
- Inventor: Eugene E. Krueger , Sameer K. Ajmera
- Applicant: DRS Network & Imaging Systems, LLC
- Applicant Address: US FL Melbourne
- Assignee: DRS NETWORK & IMAGING SYSTEMS, LLC
- Current Assignee: DRS NETWORK & IMAGING SYSTEMS, LLC
- Current Assignee Address: US FL Melbourne
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/146 ; H01L49/02

Abstract:
A photodetector structure includes a readout integrated circuit (ROIC) substrate and a dielectric layer overlaying the IC substrate. The dielectric layer defines a plurality of recesses formed in a top surface of the dielectric layer where each recess has at least one sidewall that extends from a top surface of the dielectric layer to a bottom portion of each respective recess. A capacitor structure forms a portion of the photodetector structure and includes a first electrode formed across the top surface of the dielectric layer and across the at least one sidewall of each recess of the plurality of recesses. A capacitor dielectric layer is formed across the first electrode and a second electrode is formed across the capacitor dielectric layer. A detector overlays the capacitor structure.
Public/Granted literature
- US20220013555A1 HIGH-DENSITY CAPACITOR FOR FOCAL PLANE ARRAYS Public/Granted day:2022-01-13
Information query
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