Invention Grant
- Patent Title: Method of manufacturing semiconductor structure and semiconductor structure
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Application No.: US17651089Application Date: 2022-02-15
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Publication No.: US12096618B2Publication Date: 2024-09-17
- Inventor: Jingwen Lu
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2110302133.4 2021.03.22
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/768

Abstract:
The present application provides a method of manufacturing a semiconductor structure and a semiconductor structure. The method of manufacturing a semiconductor structure includes: forming a first conductive layer in a first trench of a substrate, where a top surface of the first conductive layer is recessed; forming a bit line structure on the first conductive layer; forming a third dielectric layer and a fourth dielectric layer, where the fourth dielectric layer at least covers the bottom and a side wall of a second trench; and removing a part of the first dielectric layer and the fourth dielectric layer that covers the bottom of the second trench, to form a third trench, where the third trench exposes the substrate. The semiconductor structure is manufactured through the method of manufacturing a semiconductor structure.
Public/Granted literature
- US20220302128A1 METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE Public/Granted day:2022-09-22
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