Invention Grant
- Patent Title: Floating gate test structure for embedded memory device
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Application No.: US18344161Application Date: 2023-06-29
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Publication No.: US12096629B2Publication Date: 2024-09-17
- Inventor: Hung-Ling Shih , Yong-Shiuan Tsair
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; G11C29/14 ; H01L21/28 ; H01L21/311 ; H01L21/3213 ; H01L23/522 ; H01L23/528 ; H01L29/08 ; H01L29/66 ; H01L29/788 ; H10B41/30 ; H10B41/42

Abstract:
Various embodiments of the present application are directed to a method for forming an integrated circuit (IC) comprising forming a multilayer film to form a plurality of memory cell structures disposed over a substrate and a plurality of memory test structures next to the memory cell structures. A memory test structure comprises a dummy control gate separated from the substrate by a dummy floating gate. The method further comprises forming a conductive floating gate test contact via along sidewalls of the dummy control gate and the dummy floating gate.
Public/Granted literature
- US20230345717A1 FLOATING GATE TEST STRUCTURE FOR EMBEDDED MEMORY DEVICE Public/Granted day:2023-10-26
Information query
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