Invention Grant
- Patent Title: Slurry, screening method, and polishing method
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Application No.: US17263089Application Date: 2018-09-25
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Publication No.: US12104112B2Publication Date: 2024-10-01
- Inventor: Satoyuki Nomura , Tomohiro Iwano , Takaaki Matsumoto , Tomoyasu Hasegawa , Tomomi Kukita
- Applicant: Showa Denko Materials Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: RESONAC CORPORATION
- Current Assignee: RESONAC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery LLP
- Priority: WO TJP2018028105 2018.07.26
- International Application: PCT/JP2018/035485 2018.09.25
- International Announcement: WO2020/021733A 2020.01.30
- Date entered country: 2021-01-25
- Main IPC: C09K3/14
- IPC: C09K3/14 ; B24B37/04 ; C09G1/02 ; H01L21/304 ; H01L21/3105 ; H01L21/66 ; C01F17/235

Abstract:
A slurry containing abrasive grains and a liquid medium, in which the abrasive grains contain at least one metal compound selected from the group consisting of a metal oxide and a metal hydroxide, the metal compound contains a metal capable of taking a plurality of valences, and when the slurry is brought into contact with a surface to be polished to bring the abrasive grains into contact with the surface to be polished, the slurry yields 0.13 or more in X-ray photoelectron spectroscopy as a ratio of the lowest valence among the plurality of valences of the metal.
Public/Granted literature
- US20210309884A1 SLURRY, SCREENING METHOD, AND POLISHING METHOD Public/Granted day:2021-10-07
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