Invention Grant
- Patent Title: Chip-level disc-type acousto-optic standing wave gyroscope
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Application No.: US17641481Application Date: 2021-09-30
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Publication No.: US12104906B2Publication Date: 2024-10-01
- Inventor: Honglong Chang , Lu Tian , Qiang Shen , Ge Yang
- Applicant: NORTHWESTERN POLYTECHNICAL UNIVERSITY
- Applicant Address: CN Xi'an
- Assignee: NORTHWESTERN POLYTECHNICAL UNIVERSITY
- Current Assignee: NORTHWESTERN POLYTECHNICAL UNIVERSITY
- Current Assignee Address: CN Xi'an
- Agency: IPro, PLLC
- Priority: CN 2110625024.6 2021.06.04
- International Application: PCT/CN2021/122064 2021.09.30
- International Announcement: WO2022/252459A 2022.12.08
- Date entered country: 2022-03-09
- Main IPC: G01C19/72
- IPC: G01C19/72

Abstract:
Disclosed is a chip-level disc-type acousto-optic standing wave gyroscope including a substrate and a gyroscope structure placed on an upper surface of the substrate; the substrate is in a shape of a circular disc; the gyroscope structure includes an acoustic wave drive module and an optical detection module, the acoustic wave drive module is arranged in a circular shape taking the center of the circular disc as an origin and extending outward radially, and the optical detection module is arranged in the middle of the acoustic wave drive module and is annular; the acoustic wave drive module includes an annular interdigitated transducer, a metal electrode layer group uniformly sputtered on the annular interdigitated transducer, annularly arranged metallic pillars and an annular reflection grating, respectively placed in sequence from center of the disk radially to periphery of the disk; the optical detection module includes a first grating coupler, an optical waveguide at a light source input end, a first coupler, a second coupler, an optical waveguide at a signal output end and a second grating coupler, which are connected in sequence. According to the technical solution of the disclosure, the sensitivity of gyroscope detection can be improved.
Public/Granted literature
- US20240053148A1 A CHIP-LEVEL DISC-TYPE ACOUSTO-OPTIC STANDING WAVE GYROSCOPE Public/Granted day:2024-02-15
Information query
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