Invention Grant
- Patent Title: Electrooptical systems having heating elements
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Application No.: US17282199Application Date: 2019-10-03
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Publication No.: US12105277B2Publication Date: 2024-10-01
- Inventor: Yair Alpern , Michael Girgel
- Applicant: Innoviz Technologies Ltd.
- Applicant Address: IL Rosh Hayin
- Assignee: Innoviz Technologies Ltd.
- Current Assignee: Innoviz Technologies Ltd.
- Current Assignee Address: IL Rosh Ha'ayin
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- International Application: PCT/IB2019/001075 2019.10.03
- International Announcement: WO2020/070554A 2020.04.09
- Date entered country: 2021-04-01
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B7/00 ; G01S7/481 ; G02B26/10 ; H05B1/02 ; H05B3/18 ; G01S17/931 ; H10N30/20

Abstract:
A microelectromechanical system (MEMS) mirror assembly may comprise a frame and a MEMS mirror coupled to the frame. The MEMS mirror assembly may also include at least one piezoelectric actuator including a body and a piezoelectric element. When subjected to an electrical field, the piezoelectric element may be configured to bend the body, thereby moving the MEMS mirror with respect to a plane of the frame. The MEMS mirror assembly may further include at least one heating resistor configured to heat the piezoelectric element when an electric current passes through the at least one heating resistor.
Public/Granted literature
- US20210341729A1 ELECTROOPTICAL SYSTEMS HAVING HEATING ELEMENTS Public/Granted day:2021-11-04
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