Invention Grant
- Patent Title: Redistribution layer structure and manufacturing method thereof
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Application No.: US17533068Application Date: 2021-11-22
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Publication No.: US12107036B2Publication Date: 2024-10-01
- Inventor: Kuo-Jung Fan , Cheng-Chi Wang , Heng-Shen Yeh , Chuan-Ming Yeh
- Applicant: Innolux Corporation
- Applicant Address: TW Miao-Li County
- Assignee: Innolux Corporation
- Current Assignee: Innolux Corporation
- Current Assignee Address: TW Miaoli County
- Agency: JCIPRNET
- Priority: CN 2011418487.7 2020.12.07 CN 2111324446.6 2021.11.10
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/48

Abstract:
A redistribution layer structure and the manufacturing method thereof are provided. The redistribution layer structure includes a first metal layer, a first dielectric layer, a second metal layer, and a second dielectric layer. The first dielectric layer is disposed on the first metal layer. The second metal layer is disposed on the first dielectric layer. The second dielectric layer is disposed on the second metal layer. A chemical resistance of the first dielectric layer is greater than a chemical resistance of the second dielectric layer.
Public/Granted literature
- US20220181242A1 REDISTRIBUTION LAYER STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-06-09
Information query
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