Invention Grant
- Patent Title: Wire bonding apparatus and method for manufacturing semiconductor device
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Application No.: US17435696Application Date: 2020-07-15
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Publication No.: US12107070B2Publication Date: 2024-10-01
- Inventor: Hiroaki Yoshino , Shinsuke Tei
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- International Application: PCT/JP2020/027421 2020.07.15
- International Announcement: WO2022/013955A 2022.01.20
- Date entered country: 2021-09-01
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
Provided is a method for manufacturing a semiconductor device which connects a first bond point and a second bond point by a wire. The method includes: a ball bonding step in which a crimping ball and a ball neck are formed at the first bond point by ball bonding; a thin-walled portion forming step in which a thin-walled portion having a reduced cross-sectional area is formed between the ball neck and the crimping ball; a wire tail separating step in which after a capillary is raised to unroll a wire tail, the capillary is moved in a direction to the second bond point, and the wire tail and the crimping ball are separated in the thin-walled portion; and a wire tail joining step in which the capillary is lowered and a side surface of the separated wire tail is joined onto the crimping ball.
Public/Granted literature
- US20220328450A1 WIRE BONDING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2022-10-13
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