• Patent Title: Wire bonding apparatus and method for manufacturing semiconductor device
  • Application No.: US17435696
    Application Date: 2020-07-15
  • Publication No.: US12107070B2
    Publication Date: 2024-10-01
  • Inventor: Hiroaki YoshinoShinsuke Tei
  • Applicant: SHINKAWA LTD.
  • Applicant Address: JP Tokyo
  • Assignee: SHINKAWA LTD.
  • Current Assignee: SHINKAWA LTD.
  • Current Assignee Address: JP Tokyo
  • Agency: JCIPRNET
  • International Application: PCT/JP2020/027421 2020.07.15
  • International Announcement: WO2022/013955A 2022.01.20
  • Date entered country: 2021-09-01
  • Main IPC: H01L23/00
  • IPC: H01L23/00
Wire bonding apparatus and method for manufacturing semiconductor device
Abstract:
Provided is a method for manufacturing a semiconductor device which connects a first bond point and a second bond point by a wire. The method includes: a ball bonding step in which a crimping ball and a ball neck are formed at the first bond point by ball bonding; a thin-walled portion forming step in which a thin-walled portion having a reduced cross-sectional area is formed between the ball neck and the crimping ball; a wire tail separating step in which after a capillary is raised to unroll a wire tail, the capillary is moved in a direction to the second bond point, and the wire tail and the crimping ball are separated in the thin-walled portion; and a wire tail joining step in which the capillary is lowered and a side surface of the separated wire tail is joined onto the crimping ball.
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