Invention Grant
- Patent Title: Backside refraction layer for backside illuminated image sensor and methods of forming the same
-
Application No.: US17867109Application Date: 2022-07-18
-
Publication No.: US12107104B2Publication Date: 2024-10-01
- Inventor: Po-Han Chen , Kuo-Cheng Lee , Fu-Cheng Chang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- The original application number of the division: US16715318 2019.12.16
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Photosensors may be formed on a front side of a semiconductor substrate. An optical refraction layer having a first refractive index may be formed on a backside of the semiconductor substrate. A grid structure including openings is formed over the optical refraction layer. A masking material layer is formed over the grid structure and the optical refraction layer. The masking material layer may be anisotropically etched using an anisotropic etch process that collaterally etches a material of the optical refraction layer and forms non-planar distal surface portions including random protrusions on physically exposed portions of the optical refraction layer. An optically transparent layer having a second refractive index that is different from the first refractive index may be formed on the non-planar distal surface portions of the optical refraction layer. A refractive interface refracts incident light in random directions, and improves quantum efficiency of the photo sensors.
Public/Granted literature
- US20220352230A1 BACKSIDE REFRACTION LAYER FOR BACKSIDE ILLUMINATED IMAGE SENSOR AND METHODS OF FORMING THE SAME Public/Granted day:2022-11-03
Information query
IPC分类: