Invention Grant
- Patent Title: Self-organized quantum dot semiconductor structure
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Application No.: US17531688Application Date: 2021-11-19
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Publication No.: US12107155B2Publication Date: 2024-10-01
- Inventor: Pei-Wen Li , Kang-Ping Peng , Ching-Lun Chen , Tsung-Lin Huang
- Applicant: National Yang Ming Chiao Tung University
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL CHIAO TUNG UNIVERSITY
- Current Assignee: NATIONAL CHIAO TUNG UNIVERSITY
- Current Assignee Address: TW Hsinchu
- Agency: TOMANAGEIP
- Main IPC: H01L29/775
- IPC: H01L29/775 ; G06N10/00 ; H01L29/12 ; H01L29/16

Abstract:
The invention provides a self-organized quantum dot semiconductor structure. The quantum dot semiconductor structure includes: a conductive ridge on a substrate; an insulative layer covering the substrate and the conductive ridge, wherein the insulative layer includes a top portion and two sidewalls over the conductive ridge; a semiconductor mechanism of etching back and thermal oxidation, implemented on a semiconductor-alloyed layer set on the insulative layer; a plurality of quantum dots respectively embedded within a plurality of silicon dioxide spacer islands based on the semiconductor mechanism, the quantum dots and the silicon dioxide spacer islands adhered to the sidewalls of the insulative layer; and a plurality of conductive ledges adhered to the silicon dioxide spacer islands, wherein each of the conductive ledges is a portion of an electrode self-alignment to the quantum dot.
Public/Granted literature
- US20220085194A1 SELF-ORGANIZED QUANTUM DOT SEMICONDUCTOR STRUCTURE Public/Granted day:2022-03-17
Information query
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