- Patent Title: Vertical cavity surface emitting laser with integrated photodiode
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Application No.: US17334836Application Date: 2021-05-31
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Publication No.: US12107388B2Publication Date: 2024-10-01
- Inventor: Ulrich Weichmann
- Applicant: TRUMPF Photonic Components GmbH
- Applicant Address: DE Ulm
- Assignee: TRUMPF PHOTONIC COMPONENTS GMBH
- Current Assignee: TRUMPF PHOTONIC COMPONENTS GMBH
- Current Assignee Address: DE Ulm
- Agency: LEYDIG, VOIT & MAYER, LTD.
- Priority: EP 177802 2020.06.02
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/026

Abstract:
A vertical cavity surface emitting laser (VCSEL) emits laser light. The VCSEL has an optical resonator and a photodiode. The optical resonator has: a first mirror, an active region configured to generate laser light, and a second mirror. The active region is arranged between the first mirror and the second mirror. The photodiode is integrated in the optical resonator. The photodiode has: an absorption region having a plurality of absorbing layers configured to absorb the generated laser light. The absorbing layers are arranged spaced apart from one another by a distance d which satisfies the condition: d=(2k−1)λ/(4 m). Where λ is the wavelength of the laser light in the absorption region, and k and m are natural numbers ≥1.
Public/Granted literature
- US20210376560A1 VERTICAL CAVITY SURFACE EMITTING LASER WITH INTEGRATED PHOTODIODE Public/Granted day:2021-12-02
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