Spectral filter, and image sensor and electronic device including the spectral filter
Abstract:
A spectral filter may include a plurality of filter arrays each including a plurality of unit filters having different center wavelengths from each other. Each of the plurality of unit filters may include a first metal reflection layer and a second metal reflection layer which are disposed to be apart from each other; a cavity including a first pattern and being arranged between the first metal reflection layer and the second metal reflection layer; and a lower pattern film being disposed under the first metal reflection layer and including a second pattern. In unit filters having a same center wavelength in each of the plurality of unit filters corresponding to the plurality of filter arrays, the first pattern of the cavity and the second pattern of the lower pattern film may vary according to a position of the unit filters.
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