Invention Grant
- Patent Title: Wafer placement table
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Application No.: US17305170Application Date: 2021-07-01
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Publication No.: US12108498B2Publication Date: 2024-10-01
- Inventor: Yuma Iwata , Seiya Inoue , Reo Watanabe
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Nagoya
- Agency: BURR PATENT LAW, PLLC
- Priority: JP 20174774 2020.10.16
- Main IPC: H05B3/06
- IPC: H05B3/06 ; H05B1/02 ; H05B3/03 ; H05B3/28

Abstract:
A wafer placement table includes a ceramic plate, an electrode embedded in the ceramic plate, a hollow ceramic shaft attached to a surface of the ceramic plate, a power-supplying member running inside the ceramic shaft and connected to a terminal of the electrode, a plate-side attaching site defined on the ceramic plate and to which the power-supplying member is attached, and a power-source-side attaching site defined at a free end of the ceramic shaft and to which the power-supplying member is attached. The power-source-side attaching site is defined in correspondence with the plate-side attaching site and in such a manner as to be shifted from the plate-side attaching site in plan view. The power-supplying member includes a redirecting portion where the power-supplying member extending from the power-source-side attaching site is forcibly redirected toward the plate-side attaching site.
Public/Granted literature
- US20220124875A1 WAFER PLACEMENT TABLE Public/Granted day:2022-04-21
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