Invention Grant
- Patent Title: Semiconductor storage device with pillar
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Application No.: US17190739Application Date: 2021-03-03
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Publication No.: US12108598B2Publication Date: 2024-10-01
- Inventor: Kazuharu Yamabe
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 20146059 2020.08.31
- Main IPC: H10B43/20
- IPC: H10B43/20 ; H01L23/00 ; H10B41/10 ; H10B41/20 ; H10B41/40 ; H10B43/10 ; H10B43/40

Abstract:
A semiconductor storage device includes a substrate, a plurality of first conductive layers arranged in a first direction intersecting with a surface of the substrate, a first semiconductor layer that extends in the first direction and faces the plurality of first conductive layers, a first gate insulating film that extends in the first direction and covers an outer peripheral surface of the first semiconductor layer, a first insulating layer that extends in the first direction and has an outer peripheral surface covered with the first semiconductor layer, and a second conductive layer that is farther from the substrate than the plurality of first conductive layers and is connected to one end in the first direction of the first semiconductor layer. The first semiconductor layer includes a first region facing the plurality of first conductive layers and a second region farther from the substrate than the first region. The second conductive layer is connected to an inner peripheral surface and an outer peripheral surface of the second region of the first semiconductor layer and is in contact with one end in the first direction of the first insulating layer.
Public/Granted literature
- US20220068949A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2022-03-03
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