Invention Grant
- Patent Title: Heat exchanger with multistaged cooling
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Application No.: US17679824Application Date: 2022-02-24
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Publication No.: US12111110B2Publication Date: 2024-10-08
- Inventor: Manoj A. Gajendra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan LLP
- The original application number of the division: US16668447 2019.10.30
- Main IPC: F28D1/02
- IPC: F28D1/02 ; F28F9/00 ; B01D5/00 ; H01J37/32 ; H01L21/67

Abstract:
A heat exchanger for abating compounds produced in semiconductor processes is presented. When hot effluent flows into the heat exchanger, a coolant can be flowed to walls of a fluid heat exchanging surface within the heat exchanger. The heat exchanging surface can include a plurality of channel regions which creates a multi stage cross flow path for the hot effluent to flow down the heat exchanger. This flow path forces the hot effluent to hit the cold walls of the fluid heat exchanging surface, significantly cooling the effluent and preventing it from flowing directly into the vacuum pumps and causing heat damage. The heat exchanger can be created by sequentially depositing layers of thermally conductive material on surfaces using 3-D printing, creating a much smaller footprint and reducing costs.
Public/Granted literature
- US20220178617A1 HEAT EXCHANGER WITH MULTISTAGED COOLING Public/Granted day:2022-06-09
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