Invention Grant
- Patent Title: Methods and systems for sample transfer
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Application No.: US17584303Application Date: 2022-01-25
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Publication No.: US12112916B2Publication Date: 2024-10-08
- Inventor: Krishna Kanth Neelisetty , Milos Trenz , Jindrich Vondruska , Jakub Stetina
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/18
- IPC: H01J37/18

Abstract:
Air sensitive sample may be transferred between charged particle instruments or between charged particle instrument and a glove box using a sample transfer system. The sample transfer system includes a transfer shuttle for receiving a sample carrier and a transfer rod detachable coupled to the transfer shuttle. The transfer rod moves the sample carrier into or out of the transfer shuttle.
Public/Granted literature
- US20230132874A1 METHODS AND SYSTEMS FOR SAMPLE TRANSFER Public/Granted day:2023-05-04
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