Invention Grant
- Patent Title: Wiring structure, method for manufacturing same, and semiconductor package
-
Application No.: US17926710Application Date: 2021-06-23
-
Publication No.: US12114437B2Publication Date: 2024-10-08
- Inventor: Masaya Toba , Kazuyuki Mitsukura
- Applicant: Showa Denko Materials Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: RESONAC CORPORATION
- Current Assignee: RESONAC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: FITCH, EVEN, TABIN & FLANNERY, LLP
- Priority: JP 20108669 2020.06.24 JP 20108697 2020.06.24
- International Application: PCT/JP2021/023799 2021.06.23
- International Announcement: WO2021/261525A 2021.12.30
- Date entered country: 2022-11-21
- Main IPC: H05K3/38
- IPC: H05K3/38 ; H01L21/48 ; H01L23/498 ; H05K1/09 ; H05K3/18 ; H05K3/46

Abstract:
Disclosed is a method for manufacturing a wiring structure including a step of forming a wiring on an insulating resin layer. The step of forming the wiring includes: forming a modified region including pores in a surface layer of the insulating resin layer by treating a surface of the insulating resin layer with a treatment method including surface modification; forming a seed layer on the surface of the insulating resin layer by sputtering; and forming the wiring on the seed layer by electrolytic copper plating.
Public/Granted literature
- US20230209725A1 WIRING STRUCTURE, METHOD FOR MANUFACTURING SAME, AND SEMICONDUCTOR PACKAGE Public/Granted day:2023-06-29
Information query