Invention Grant
- Patent Title: Methods for manufacturing semiconductor devices, and semiconductor devices
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Application No.: US17605011Application Date: 2021-07-28
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Publication No.: US12114483B2Publication Date: 2024-10-08
- Inventor: Dandan He
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2110406661.4 2021.04.15
- International Application: PCT/CN2021/109068 2021.07.28
- International Announcement: WO2022/217782A 2022.10.20
- Date entered country: 2021-10-20
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
The present application provides a method for manufacturing a semiconductor device, and a semiconductor device. The method includes: providing a substrate; forming a first conductive material layer on the substrate; performing plasma treatment on the first conductive material layer to form a first conductive layer; successively forming a second conductive layer, a first block layer, a third conductive layer and a fourth conductive layer on the first conductive layer; forming a dielectric layer on the fourth conductive layer, and forming an ohmic contact layer at a junction of the first conductive layer and the second conductive layer; forming an initial bit line structure; performing NH3/N2 plasma treatment on the initial bit line structure to form a second block layer on a sidewall of the first conductive layer and a third block layer on a sidewall of the ohmic contact layer.
Public/Granted literature
- US20230180463A1 METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES, AND SEMICONDUCTOR DEVICES Public/Granted day:2023-06-08
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