Invention Grant
- Patent Title: Capping layer over FET FeRAM to increase charge mobility
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Application No.: US18335167Application Date: 2023-06-15
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Publication No.: US12114507B2Publication Date: 2024-10-08
- Inventor: Rainer Yen-Chieh Huang , Hai-Ching Chen , Chung-Te Lin
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H10B51/30
- IPC: H10B51/30 ; H01L21/28 ; H01L23/522 ; H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L29/786 ; H10B51/00

Abstract:
In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode over a substrate, and a gate dielectric layer arranged over the gate electrode. The gate dielectric layer includes a ferroelectric material. An active structure is arranged over the gate dielectric layer and includes a semiconductor material. A source contact and a drain contact are arranged over the active structure. A capping structure is arranged between the source and drain contacts and over the active structure. The capping structure includes a first metal material.
Public/Granted literature
- US20230329000A1 CAPPING LAYER OVER FET FERAM TO INCREASE CHARGE MOBILITY Public/Granted day:2023-10-12
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