Invention Grant
- Patent Title: Method for forming pattern
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Application No.: US17647766Application Date: 2022-01-12
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Publication No.: US12125704B2Publication Date: 2024-10-22
- Inventor: Qiang Wan , Jun Xia , Kangshu Zhan , Penghui Xu , Tao Liu , Sen Li
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2110814383.6 2021.07.19
- Main IPC: H01L21/033
- IPC: H01L21/033

Abstract:
A method for forming a pattern can include the following operations. A substrate is provided, on the surface of which a patterned photoresist layer is formed. Based on the photoresist layer, isolation sidewalls are formed, in which each isolation sidewall includes a first sidewall close to the photoresist layer and a second sidewall away from the photoresist layer. Core material layers are formed between two adjacent isolation sidewalls. The second sidewalls are removed to form the pattern composed of the first sidewalls and the core material layers.
Public/Granted literature
- US20230013448A1 METHOD FOR FORMING PATTERN Public/Granted day:2023-01-19
Information query
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