- Patent Title: Bonding apparatus and method of manufacturing semiconductor device
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Application No.: US17694019Application Date: 2022-03-14
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Publication No.: US12125718B2Publication Date: 2024-10-22
- Inventor: Yoshio Mizuta
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP 21152246 2021.09.17
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B32B37/00 ; H01L21/683

Abstract:
A bonding apparatus according to an embodiment includes a first chuck, a second chuck, and a pushpin arranged in a center portion of the second chuck. The first chuck includes a first area and a second area in a plane view. The first chuck includes a first rib arranged to divide the first area and the second area from each other in the plane view. The first area includes an area that overlaps the pushpin in the plane view. The second area encircles an outer perimeter of the first area in the plane view. The first chuck has a plurality of pins arranged at intervals in the second area, and has no pin in the area of the first area that overlaps the pushpin in the plane view.
Public/Granted literature
- US20230091517A1 BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2023-03-23
Information query
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