Invention Grant
- Patent Title: Mounting apparatus and mounting method
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Application No.: US17455998Application Date: 2021-11-22
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Publication No.: US12125887B2Publication Date: 2024-10-22
- Inventor: Fencheng Zheng
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2110806169.6 2021.07.16
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L29/40

Abstract:
The embodiment of the present application discloses a mounting apparatus and a mounting method. The mounting apparatus comprises: a bracket; a tray movably disposed on the bracket, wherein the tray comprises the first bearing portion and the second bearing portion, the second bearing portion is disposed around the circumference of the first bearing portion and coincides with the center of gravity of the first bearing portion, a first sensor, which is disposed at the center of gravity of the first bearing portion and collects the offset of the center of gravity of the supported first upper electrode portion and the second upper electrode portion; and a driving assembly, which is connected to the tray, drives the tray to ascend and descend and drives the tray to adjust the supporting positions of the first upper electrode portion and the second upper electrode portion.
Public/Granted literature
- US20230014491A1 Mounting Apparatus and Mounting Method Public/Granted day:2023-01-19
Information query
IPC分类: