Invention Grant
- Patent Title: Vertical cavity surface emitting laser device and manufacturing method thereof
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Application No.: US17558614Application Date: 2021-12-22
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Publication No.: US12126136B2Publication Date: 2024-10-22
- Inventor: Cheng-Yi Ou , Chih-Yuan Lin , Te-Lieh Pan , Cheng-Hsiao Chi
- Applicant: ABOCOM SYSTEMS, INC.
- Applicant Address: TW Miaoli County
- Assignee: ABOCOM SYSTEMS, INC.
- Current Assignee: ABOCOM SYSTEMS, INC.
- Current Assignee Address: TW Miaoli County
- Agent Fei-Hung Yang
- Priority: TW 0100815 2021.01.08
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/34 ; H01S5/343

Abstract:
A vertical cavity surface emitting laser (VCSEL) device includes a substrate, a first mirror layer, a tunnel junction layer, a second mirror layer, an active layer, an oxide layer and a third mirror layer sequentially stacked with one another. The first mirror layer and the third mirror layer are N-type distributed Bragg reflectors (N-DBR), and the second mirror layer is P-type distributed Bragg reflector (P-DBR). The tunnel junction layer is provided for the VCSEL device to convert a part of the P-DBR into N-DBR to reduce the series resistance of the VCSEL device, and the tunnel junction layer is not used as current-limiting apertures. This disclosure further discloses a VCSEL device manufacturing method with the in-situ and one-time epitaxy features to avoid the risk of process variation caused by moving the device into and out from an epitaxial cavity.
Public/Granted literature
- US20220224080A1 VERTICAL CAVITY SURFACE EMITTING LASER DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-07-14
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