Invention Grant
- Patent Title: Easily adjustable optical emission spectrometer
-
Application No.: US17774405Application Date: 2020-11-04
-
Publication No.: US12130178B2Publication Date: 2024-10-29
- Inventor: André Peters , Rainer Simons
- Applicant: Hitachi High-Tech Analytical Science GmbH
- Applicant Address: DE Uedem
- Assignee: HITACHI HIGH-TECH ANALYTICAL SCIENCE GMBH
- Current Assignee: HITACHI HIGH-TECH ANALYTICAL SCIENCE GMBH
- Current Assignee Address: DE Uedem
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- Priority: EP 207192 2019.11.05
- International Application: PCT/EP2020/080992 2020.11.04
- International Announcement: WO2021/089639A 2021.05.14
- Date entered country: 2022-05-04
- Main IPC: G01J3/18
- IPC: G01J3/18 ; G01J3/02 ; G01J3/36

Abstract:
The invention relates to an optical emission spectrometer (1) being easily adjustable, and to a method (100) to set-up and operate such a spectrometer (1) comprising a plasma stand (2) to establish a light emitting plasma from sample material, and an optical system (3) to measure the spectrum of the light (L) emitted by the plasma being characteristic to the sample material, where the optical system (3) comprises at least one light entrance aperture (31), at least one diffraction grating (32) to split up the light (L) coming from the plasma (A) and one or more detectors (33) to measure the spectrum of the light (L), wherein the plasma stand (2) and the optical system (3) are directly and fixedly mounted on respective a plasma stand flange (2B) and an optical system flange (3B) which are directly and fixedly connected to each other and wherein the optical emission spectrometer (1) further comprises an analyzing unit (34) adapted to analyze the measured spectrum and to compensate for a drift of the spectrum relative to the detector (33) potentially caused by heat transferred from the plasma stand (2) to the optical system (3) considering the thermal expansion of the optical system (3).
Public/Granted literature
- US20220390279A1 AN EASILY ADJUSTABLE OPTICAL EMISSION SPECTROMETER Public/Granted day:2022-12-08
Information query