Invention Grant
- Patent Title: MEMS resonator array arrangement
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Application No.: US16964505Application Date: 2019-02-06
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Publication No.: US12132467B2Publication Date: 2024-10-29
- Inventor: Antti Jaakkola , Aarne Oja
- Applicant: KYOCERA TECHNOLOGIES OY
- Applicant Address: FI Espoo
- Assignee: KYOCERA Technologies Oy
- Current Assignee: KYOCERA Technologies Oy
- Current Assignee Address: FI Espoo
- Agency: Espatent Oy
- Priority: FI 185113 2018.02.08
- International Application: PCT/FI2019/050087 2019.02.06
- International Announcement: WO2019/155120A 2019.08.15
- Date entered country: 2020-07-23
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/02

Abstract:
A microelectromechanical resonator, including a support structure, a resonator element suspended to the support structure, the resonator element including a plurality of sub-elements, and an actuator for exciting the resonator element into a resonance mode. The sub-elements are dimensioned such that they are dividable in one direction into one or more fundamental elements having an aspect ratio different from 1 so that each of the fundamental elements supports a fundamental resonance mode, which together define a compound resonance mode of the sub-element. The sub-elements are further coupled to each other by connection elements and positioned with respect to each other such that the fundamental elements are in a rectangular array configuration, wherein each fundamental element occupies a single array position, and at least one array position of the array configuration is free from fundamental elements.
Public/Granted literature
- US20210036686A1 MEMS RESONATOR ARRAY ARRANGEMENT Public/Granted day:2021-02-04
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