Invention Grant
- Patent Title: Memory device having memory cell with reduced protrusion
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Application No.: US17582193Application Date: 2022-01-24
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Publication No.: US12133374B2Publication Date: 2024-10-29
- Inventor: Ching-Kai Chuang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agent Xuan Zhang
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
The present application provides a memory device having a memory cell with reduced protrusion protruding from the memory cell. The memory device includes a semiconductor substrate having a fin portion protruding from a surface of the semiconductor substrate; a semiconductive layer disposed conformal to the fin portion; a conductive layer disposed over the semiconductive layer; an insulating layer disposed over the conductive layer; and a protrusion including a first protruding portion laterally protruding from the semiconductive layer and along the surface, a second protruding portion laterally protruding from the conductive layer and over the first protruding portion, and a third protruding portion laterally protruding from the insulating layer and over the second protruding portion, wherein the protrusion has an undercut profile.
Public/Granted literature
- US20230240064A1 MEMORY DEVICE HAVING MEMORY CELL WITH REDUCED PROTRUSION Public/Granted day:2023-07-27
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