Invention Grant
- Patent Title: Apparatus for an inert anode plating cell
-
Application No.: US17990157Application Date: 2022-11-18
-
Publication No.: US12134831B2Publication Date: 2024-11-05
- Inventor: Gregory Kearns , Bryan L. Buckalew , Jacob Kurtis Blickensderfer
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: C25D5/08
- IPC: C25D5/08 ; C25D7/12 ; C25D17/00 ; C25D17/06 ; C25D17/12

Abstract:
In one example, an electroplating apparatus is provided for electroplating a wafer. The electroplating apparatus comprises a wafer holder for holding a wafer during an electroplating operation and a plating cell configured to contain an electrolyte during the electroplating operation. An anode chamber is disposed within the plating cell, and a charge plate is disposed within the anode chamber. An anode is positioned above the charge plate within the anode chamber. In some examples, the anode chamber is a membrane-less anode chamber.
Public/Granted literature
- US20230084072A1 APPARATUS FOR AN INERT ANODE PLATING CELL Public/Granted day:2023-03-16
Information query