Invention Grant
- Patent Title: Plating apparatus and cleaning method of contact member of plating apparatus
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Application No.: US17764454Application Date: 2021-03-17
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Publication No.: US12134833B2Publication Date: 2024-11-05
- Inventor: Masaya Seki , Masaki Tomita , Shao Hua Chang
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- International Application: PCT/JP2021/010779 WO 20210317
- International Announcement: WO2022/195756 WO 20220922
- Main IPC: C25D21/08
- IPC: C25D21/08 ; C25D17/00 ; C25D17/06 ; C25D21/10 ; C25D21/12

Abstract:
A plating apparatus 1000 includes a plating tank, a substrate holder 20, a rotation mechanism, an elevating mechanism, a contact member 40, and a cleaning device 50 configured to clean the contact member 40. The cleaning device 50 includes a pivot shaft 51, a first arm 53, a second arm 54, and a nozzle 55 that includes at least one discharge port. Applying a cleaning fluid discharged from the discharge port to the contact member 40 cleans the contact member 40.
Public/Granted literature
- US20230340687A1 PLATING APPARATUS AND CLEANING METHOD OF CONTACT MEMBER OF PLATING APPARATUS Public/Granted day:2023-10-26
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