Gas circulation apparatus, gas circulation method, pneumatic apparatus, and semiconductor device
Abstract:
A gas circulation apparatus is applied to a pneumatic apparatus including a solenoid valve apparatus and a cylinder apparatus, and is connected in series between the solenoid valve apparatus and the cylinder apparatus. The gas circulation apparatus includes a valve core structure, a first circulation cavity, and a second circulation cavity. The valve core structure is configured to move in a first direction, so that compressed gas discharged from a first cylinder cavity of the cylinder apparatus and passing through the solenoid valve apparatus is collected and stored by the first circulation cavity, and a second cylinder cavity of the cylinder apparatus is supplied with compressed gas stored in the second circulation cavity together with the compressed gas supplied from the solenoid valve apparatus.
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