Invention Grant
- Patent Title: Gas circulation apparatus, gas circulation method, pneumatic apparatus, and semiconductor device
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Application No.: US17454240Application Date: 2021-11-09
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Publication No.: US12135045B2Publication Date: 2024-11-05
- Inventor: Qing Huang
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN202110910384.0 20210809
- Main IPC: F15B11/064
- IPC: F15B11/064 ; F15B13/04 ; H01L21/67 ; G05D7/06

Abstract:
A gas circulation apparatus is applied to a pneumatic apparatus including a solenoid valve apparatus and a cylinder apparatus, and is connected in series between the solenoid valve apparatus and the cylinder apparatus. The gas circulation apparatus includes a valve core structure, a first circulation cavity, and a second circulation cavity. The valve core structure is configured to move in a first direction, so that compressed gas discharged from a first cylinder cavity of the cylinder apparatus and passing through the solenoid valve apparatus is collected and stored by the first circulation cavity, and a second cylinder cavity of the cylinder apparatus is supplied with compressed gas stored in the second circulation cavity together with the compressed gas supplied from the solenoid valve apparatus.
Public/Granted literature
- US20230041577A1 GAS CIRCULATION APPARATUS, GAS CIRCULATION METHOD, PNEUMATIC APPARATUS, AND SEMICONDUCTOR DEVICE Public/Granted day:2023-02-09
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