Invention Grant
- Patent Title: Semi-automatic prober
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Application No.: US17464307Application Date: 2021-09-01
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Publication No.: US12135335B2Publication Date: 2024-11-05
- Inventor: Edward McCloud , Jacob Herschmann
- Applicant: QualiTau, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: QualiTau, Inc.
- Current Assignee: QualiTau, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Beyer Law Group LLP
- Main IPC: G01R1/04
- IPC: G01R1/04 ; G01R1/067 ; G01R1/073 ; G01R31/28

Abstract:
A wafer probe station system for reliability testing of a semiconductor wafer. The wafer probe station is capable of interfacing with interchangeable modules for testing of semiconductor wafers. The wafer probe station can be used with different interchangeable modules for wafer testing. Modules, such as probe card positioners and air-cooled rail systems, for example, can be mounted or docked to the probe station. The wafer probe station is also provided with a front loading mechanism having a rotatable arm that rotates at least partially out of the probe station chamber for wafer loading.
Public/Granted literature
- US20210396785A1 SEMI-AUTOMATIC PROBER Public/Granted day:2021-12-23
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