Wiring abnormality detection method and plasma processing apparatus
Abstract:
There is provided a wiring abnormality detection method in a plasma processing apparatus. The detection method comprises: applying a DC voltage from a DC power supply; measuring a current flowing in a circuit constituting a DC power supply system; comparing a measured current with a predetermined threshold value; and determining that wiring abnormality has occurred in the circuit constituting the DC power supply system when the measured current is greater than or equal to the threshold value.
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