- Patent Title: Wiring abnormality detection method and plasma processing apparatus
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Application No.: US17540255Application Date: 2021-12-02
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Publication No.: US12136541B2Publication Date: 2024-11-05
- Inventor: Natsumi Torii
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP2020-200322 20201202
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
There is provided a wiring abnormality detection method in a plasma processing apparatus. The detection method comprises: applying a DC voltage from a DC power supply; measuring a current flowing in a circuit constituting a DC power supply system; comparing a measured current with a predetermined threshold value; and determining that wiring abnormality has occurred in the circuit constituting the DC power supply system when the measured current is greater than or equal to the threshold value.
Public/Granted literature
- US20220172932A1 WIRING ABNORMALITY DETECTION METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2022-06-02
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