Invention Grant
- Patent Title: Graphite plate
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Application No.: US17583646Application Date: 2022-01-25
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Publication No.: US12136559B2Publication Date: 2024-11-05
- Inventor: Peng Xiang
- Applicant: ENKRIS SEMICONDUCTOR, INC.
- Applicant Address: CN Suzhou
- Assignee: ENKRIS SEMICONDUCTOR, INC.
- Current Assignee: ENKRIS SEMICONDUCTOR, INC.
- Current Assignee Address: CN Suzhou
- Agency: Westbridge IP LLC
- Priority: CN202120219432.7 20210126
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
Disclosed is a graphite plate to solve a problem of poor performance uniformity of an epitaxial wafer obtained during carrying on epitaxial growth of material using the graphite plate. A graphite plate includes: a graphite plate body, includes a carrying recess and a recess located on one side of the carrying recess away from a central point of the graphite plate body; and a stopper, which is embedded in the recess in a matching manner, and the stopper protrudes from the bottom surface of the carrying recess to form a limiting structure.
Public/Granted literature
- US20220238363A1 Graphite Plate Public/Granted day:2022-07-28
Information query
IPC分类: