Invention Grant
- Patent Title: Superstrate and method of making it
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Application No.: US16834465Application Date: 2020-03-30
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Publication No.: US12136564B2Publication Date: 2024-11-05
- Inventor: Fen Wan , Weijun Liu
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Abel Schillinger, LLP
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/02 ; H01L21/768
Abstract:
A superstrate can comprise a superstrate blank and a coating overlying an outer surface of the superstrate blank. The superstrate blank can comprises a central region and a tapered edge region, wherein the tapered edge region has an average taper angle of not greater than 20 degrees relative to a length direction of the superstrate blank. In one embodiment, the coating of the superstrate can be applied by spin coating and may have an edge bead below a plane of the coating surface within the central region.
Public/Granted literature
- US20210305082A1 SUPERSTRATE AND METHOD OF MAKING IT Public/Granted day:2021-09-30
Information query
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