• Patent Title: Bonding apparatus and bonding method
  • Application No.: US17436621
    Application Date: 2020-12-21
  • Publication No.: US12136604B2
    Publication Date: 2024-11-05
  • Inventor: Hideharu Nihei
  • Applicant: SHINKAWA LTD.
  • Applicant Address: JP Tokyo
  • Assignee: SHINKAWA LTD.
  • Current Assignee: SHINKAWA LTD.
  • Current Assignee Address: JP Tokyo
  • Agency: JCIPRNET
  • International Application: PCT/JP2020/047709 WO 20201221
  • International Announcement: WO2022/137287 WO 20220630
  • Main IPC: H01L23/00
  • IPC: H01L23/00 H01L25/065
Bonding apparatus and bonding method
Abstract:
The present invention includes: a position detection unit (55) detecting positions of semiconductor chips and storing each detected position in a position database (56); a position correction unit (57) outputting a corrected bonding position; and a bonding control unit (58) performing bonding of the semiconductor chips based on the corrected bonding position input from the position correction unit (57). The position correction unit (57) calculates position shift amounts between the semiconductor chips of respective stages and an accumulated position shift amount, and when the accumulated position shift amount is greater than or equal to a predetermined threshold value, corrects the position of the semiconductor chip by the accumulated position shift amount and outputs it as the corrected bonding position, and the bonding control unit (58) performs bonding of the semiconductor chip of the next stage at the corrected bonding position input from the position correction unit.
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